Frame Cleaner
This machine is a frame cleaner for semiconductor and wafer fabs. Frame Cleaner can clean the residues on the back & front side of the wafer frame and can be applied for 8"/12" frame.
Application
Frame Cleaner is used for cleaning surface particle of the wafer frame after the De-Frame Process and do inspection.
Benefits
Frame Cleaner can automatically clean residue at back & front side, and has residue and flatness inspection function. It can reduce manpower requirement and manage the cleanness and warpage deformation of the frame.
Specification & Features
- Applied for 8"/12" Wafer Frame
- Automatic working size switching
- Equipped with 8"/12" Frame Transportation Trolley
- Automatic Frame Seperating Mechanism
- Cleaning Cycle/Liquid Volume/Speed Parameters Controllable
- Back & Front Side Cleaning Function
- Flatness/Residue Inspection Function
- Supported for E84 & SECS/GEM Communication Specifications.
Added to your inquiry
MFC-3000
Frame Cleaner